Real-time optical monitoring of heteroepitaxial growth processes on Si under pulsed chemical beam epitaxy conditions

✍ Scribed by N. Dietz; U. Rossow; D.E. Aspnes; K.J. Bachmann

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 413 KB
• Volume: 102
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(96)00017-7