Real-time observation of charging dynamics in hafnium silicate films using MOS capacitance transients

✍ Scribed by Y. Lu; S. Hall; O. Buiu; J.F. Zhang

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 357 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.04.097