✦ LIBER ✦
Real-time, noninvasive monitoring of ion energy and ion current at a wafer surface during plasma etching
✍ Scribed by M. A. Sobolewski
- Book ID
- 121666087
- Publisher
- AVS (American Vacuum Society)
- Year
- 2006
- Tongue
- English
- Weight
- 417 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0734-2101
No coin nor oath required. For personal study only.