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Real-time monitoring of heteroepitaxial growth processes on the silicon(001) surface by p-polarized reflectance spectroscopy

✍ Scribed by Klaus J. Bachmann; Uwe Rossow; Nikolaus Dietz


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
584 KB
Volume
35
Category
Article
ISSN
0921-5107

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