✦ LIBER ✦
Real-time in situ spectroscopic ellipsometry investigation of the amorphous to crystalline phase transition in Mo single layers
✍ Scribed by E. Schubert; S. Mändl; H. Neumann; B. Rauschenbach
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 300 KB
- Volume
- 80
- Category
- Article
- ISSN
- 1432-0630
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