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Real-time and spectroscopic ellipsometry characterizatio of diamond and diamond-like carbon

โœ Scribed by R.W Collins; Y Cong; Y.-T Kim; K Vedam; Y Liou; A Inspektor; R Messier


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
771 KB
Volume
181
Category
Article
ISSN
0040-6090

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Raman spectroscopic and X-ray investigat
โœ R. Krawietz; B. Kรคmpfe; E. Auerswald; M. Brรผcher ๐Ÿ“‚ Article ๐Ÿ“… 2004 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 309 KB ๐Ÿ‘ 1 views

## Abstract The nonโ€destructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamondโ€like carbon (DLC) films. Whereas the only requirement for the Xโ€ray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analys