✦ LIBER ✦
Real-coded genetic algorithm for stochastic optimization: A tool for recipe qualification of semiconductor manufacturing under noisy environments
✍ Scribed by E. Zahara; S.-K.S. Fan
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 717 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0268-3768
No coin nor oath required. For personal study only.