Reactive surface processing by irradiation with excimer laser, Nd:YAG laser, free electron laser and Ti:sapphire laser in nitrogen atmosphere

✍ Scribed by E Carpene; P Schaaf; M Han; K.P Lieb; M Shinn

• Book ID: 108417566
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 110 KB
• Volume: 186
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(01)00625-0