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Reactive sputtering of thin Cu2S films for application in solar cells

✍ Scribed by Eddy VanHoecke; Marc Burgelman

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
493 KB
Volume
112
Category
Article
ISSN
0040-6090

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## Abstract In this paper we report a new method for Cu(In,Ga)Se~2~ deposition for solar cell application. Differently from the common co‐evaporation process, an alterative approach for thin film Cu(In,Ga)Se~2~ has been tested: the sputtering deposition of metal elements combined with the selenium