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Reactive sputtering of PTFE films in argon-CF4 mixtures

✍ Scribed by H.W. Lehmann; K. Frick; R. Widmer; J.L. Vossen; E. James


Book ID
107862491
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
243 KB
Volume
52
Category
Article
ISSN
0040-6090

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