✦ LIBER ✦
Reactive magnetron sputtering of CN[sub x] films: Ion bombardment effects and process characterization using optical emission spectroscopy
✍ Scribed by VlcÌek, Jaroslav; RusnÌaÌk, Karel; HaÌjek, VaÌclav; MartinuÌ, LudvıÌk
- Book ID
- 120509499
- Publisher
- American Institute of Physics
- Year
- 1999
- Tongue
- English
- Weight
- 401 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.371273
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