✦ LIBER ✦
Reactive ion etching of semiconductor materials and of dielectric and metal layers : Zdenek Novotny. TESLA Electron., 3–4, 59 (1986)
- Book ID
- 103285026
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 74 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0026-2714
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