✦ LIBER ✦
Reactive ion etching of quartz for device applications : DJ McCulloch,Philips Research Laboratories, Redhill, Surrey RH1 5KA, UK
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 157 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0042-207X
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