✦ LIBER ✦
Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma
✍ Scribed by H. Macé; H. Achard; L. Peccoud
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 285 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0167-9317
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