Reactive ion etching of direct-write metallisation patterns : Ruth E. Bucknall and Peter J. Astell-Burt. Microelectron. J.18 (1), 49 (1987)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 117 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90431-8