Reactive-ion-etch-compatible metallization for partially covered contact applications

✍ Scribed by James G. Ryan; Neal P. Marmillion; Jonathan P. Fineman; Dennis P. Bouldin

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 435 KB
• Volume: 166
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90366-5