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Reactions of SiCl groups in amorphous SiO[sub 2] with mobile interstitial chemical species: Formation of interstitial Cl[sub 2] and HCl molecules, and role of interstitial H[sub 2]O molecules

✍ Scribed by Kajihara, Koichi; Hirano, Masahiro; Skuja, Linards; Hosono, Hideo

Book ID: 120344343
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 420 KB
Volume: 98
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2005383

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