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Reactions of Cu(hfac) 2 and Co 2 (CO) 8 during Chemical Vapor Deposition of Copper−Cobalt Films

✍ Scribed by Gu, Shuo; Yao, Xuebin; Hampden-Smith, Mark J.; Kodas, Toivo T.


Book ID
121428281
Publisher
American Chemical Society
Year
1998
Tongue
English
Weight
96 KB
Volume
10
Category
Article
ISSN
0897-4756

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