✦ LIBER ✦
Reaction rate constant of Si atoms with SiH 4 molecules in a RF silane plasma
✍ Scribed by Tanaka, T; Hiramatsu, M; Nawata, M; Kono, A; Goto, T
- Book ID
- 125846329
- Publisher
- Institute of Physics
- Year
- 1994
- Tongue
- English
- Weight
- 300 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0022-3727
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