✦ LIBER ✦
Reaction products and oxide thickness formed by Ti out-diffusion and oxidization in poly-Pt/Ti/SiO2/Si with oxide films deposited
✍ Scribed by Changhong Chen; Dexiu Huang; Weiguang Zhu; Yi Feng; Xigang Wu
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 285 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
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