Reaction of cyanide ions with copper on Si surfaces and its use for Si cleaning

✍ Scribed by Yueh-Ling Liu; Naozumi Fujiwara; Hitoo Iwasa; Masao Takahashi; Shigeki Imai; Hikaru Kobayashi

• Book ID: 108279264
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 150 KB
• Volume: 600
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/j.susc.2006.01.017