✦ LIBER ✦

Reaction kinetics in tungsten/barrier metal/silicon systems

✍ Scribed by K. Suguro; Y. Nakasaki; T. Inoue; S. Shima; M. Kashiwagi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ K. Suguro; Y. Nakasaki; T. Yoshii; T. Itoh 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 422 KB

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✍ B.E. Deal; E.H. Snow; C.A. Mead 📂 Article 📅 1966 🏛 Elsevier Science 🌐 English ⚖ 598 KB

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✍ B.E. Deal; E.H. Snow; C.A. Mead 📂 Article 📅 1966 🏛 Elsevier Science 🌐 English ⚖ 130 KB

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Tungsten silicide barrier layers in alum

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Reaction Kinetics in Silicon Chemical Va

✍ Kenichi Tonokura; Mitsuo Koshi 📂 Article 📅 2003 🏛 John Wiley and Sons ⚖ 72 KB 👁 1 views