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RBS study of the effect of arsenic and phosphorus interfacial segregation upon the sintering of contacts between implanted polycrystalline silicon and aluminum: Silicon(1%)

✍ Scribed by Nicole Herbots; Maurice Lobet; Fernand Van de Wiele


Book ID
113277272
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
821 KB
Volume
7-8
Category
Article
ISSN
0168-583X

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