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Rayleigh-Mie scattering ellipsometry as anin situdiagnostic for the production of “smart nanoparticles”

✍ Scribed by Weiß, Raphaela ;Hong, Suk-Ho ;Ränsch, Jens ;Winter, Jörg


Book ID
105364772
Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
590 KB
Volume
205
Category
Article
ISSN
0031-8965

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✦ Synopsis


Abstract

We have utilised in situ Rayleigh–Mie scattering ellipsometry to analyse the growth process of amorphous hydrogenated carbon nitride (a‐C:H:N) nanoparticles synthesised in a plasma of nitrogen and acetylene. The validity of the measurements is shortly discussed. The complex refractive indices in dependence of the particle radius are carefully determined and compared with a‐C:H(:N) films which are deposited under similar conditions and analysed via multiple wavelength ellipsometry. Internal structures of the nanoparticles are then deduced from the change of optical constants during the growth. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)