Rate limiting step in CVT purification of silicon using a Si: Cu3Si source

✍ Scribed by R.C. Powell; J.M. Olson

• Book ID: 107789617
• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 374 KB
• Volume: 70
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(84)90269-0