✦ LIBER ✦
Rapid thermal processing uniformity using multivariable control of a circularly symmetric three zone lamp : Pushkar P. Apte and Krishna C. Saraswat. IEEE Transactions on Semiconductor Manufacturing5(3), 180 (1992)
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 228 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0026-2714
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