✦ LIBER ✦
Rapid Thermal Processing of Mesoporous Silica Films: A Simple Method to Fabricate Films Micrometers Thick for Microelectromechanical Systems (MEMS) Applications
✍ Scribed by Jeong, Hae-Kwon; Chandrasekharan, Ramesh; Chu, Kuan-Lun; Shannon, Mark A.; Masel, Richard I.
- Book ID
- 120214447
- Publisher
- American Chemical Society
- Year
- 2005
- Tongue
- English
- Weight
- 237 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0888-5885
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