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Rapid thermal annealing of indium-implanted silicon single crystals

✍ Scribed by Shiryaev, S. Yu.; Larsen, A. Nylandsted; Safronov, N.

Book ID: 120028537
Publisher: American Institute of Physics
Year: 1989
Tongue: English
Weight: 769 KB
Volume: 65
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.343304

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