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Rapid Prototyping of Digital Systems || Interfacing to the PS/2 Keyboard and Mouse

✍ Scribed by Hamblen, James O.; Hall, Tyson S.; Furman, Michael D.


Book ID
119946314
Publisher
Springer US
Year
2008
Tongue
English
Weight
554 KB
Edition
2008
Category
Article
ISBN
0387726713

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Thermodynamic approach to the redistribu
✍ F. RΓ©ti; Z. Sassi; L. Kaabi; J.-C. Bureau; H. Vincent; B. Balland πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 79 KB πŸ‘ 2 views

In microelectronics, during fabrication of ultrashallow p-n junctions boron is implanted in a silicon monocrystal. However, the subsequent rapid thermal annealing (RTA) causes anomalous fast diffusion (transient enhanced diffusion, TED) of the boron inwards in the crystal, hindering the formation of