Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

✍ Scribed by Issam Gereige; Stéphane Robert; Gérard Granet; Damien Jamon; Jean-Jacques Rousseau

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 128 KB
• Volume: 278
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/j.optcom.2007.06.008