Rapid characterization of an unknown optical coating on soda-lime silica glass using dynamic SIMS
✍ Scribed by Brad A. Carlson; Bradway F. Phillips
- Publisher
- John Wiley and Sons
- Year
- 1992
- Tongue
- English
- Weight
- 330 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Abstract
An unknown optical coating deposited on unpolished soda‐lime silica float glass was analyzed using dynamic secondary ion mass spectrometry (SIMS). This investigation was performed to determine the composition and layering structure of the optical coating. Results obtained in this analysis showed the number and thickness of layers making up the coating, as well as the elemental composition of each layer. More importantly, the entire investigation took less than 2 h to complete. This demonstrates the ability of SIMS to perform a rapid characterization of a complex insulating multilyer thin‐film system deposited on a rough surface.