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Rapid and direct micro-machining/patterning of polymer materials by oxygen MeV ion beam irradiation through masks

✍ Scribed by S. Brun; G. Guibert; C. Meunier; E. Guibert; H. Keppner; S. Mikhailov


Book ID
113823432
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
592 KB
Volume
269
Category
Article
ISSN
0168-583X

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