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Range and straggle of boron in photoresist : G. Baccarani and K. A. Pickar. Solid St. Electron. 15 (1972), p. 239

Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 112 KB
Volume: 11
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(72)90512-4

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