✦ LIBER ✦
Raman spectroscopy as an on-line measurement technique in a laser-CVD reactor during production of Si3N4
✍ Scribed by I.L. Tuinman; J. Veenstra; J.C.M. Marijnissen; B. Scarlett; J. Schoonman
- Book ID
- 115951298
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 405 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0021-8502
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