Raman Spectroscopic Investigation of the Stress State in Silicon Substrates near Edges of Pt/PZT Microstructures

✍ Scribed by R. Krawietz; W. Pompe; V. Sergo

• Book ID: 101380797
• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 267 KB
• Volume: 35
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/1521-4079(200004)35:4<449::aid-crat449>3.0.co;2-q