✦ LIBER ✦
Raman scattering and photoluminescence analysis of SOI/SIMOX structures obtained by sequential implantation and annealing correlated with cross sectional TEM
✍ Scribed by A. Pérez; J. Portillo; A. Cornet; J. Jiménez; J.R. Morante; P.L.F. Hemment; K.P. Homewood
- Book ID
- 113282472
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 773 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0168-583X
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