Piezoelectric thin films on high acoustic velocity non piezoelectric substrates, such as ZnO and AlN, deposited on diamond or sapphire substrates, are attractive for high frequency and low-loss surface acoustic wave devices. In this work, ZnO films were epitaxialy grown on R-Al 2 O 3 and C-Al 2 O 3
β¦ LIBER β¦
Raman microprobe spectroscopy measurements of residual stress distribution along blisters in Cr2O3 thin films
β Scribed by M. Kemdehoundja; J.L. Grosseau-Poussard; J.F. Dinhut
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 560 KB
- Volume
- 256
- Category
- Article
- ISSN
- 0169-4332
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β¦ Synopsis
optical microscopy after chemical treatment of about 35 mm with no preferential orientation [8]. Samples were mechanically cut (thickness: 2 mm, diameter: 12 mm) and polished to a 5 mm (SiC paper) or 1 mm (diamond paste) surface finish. Before the oxidation treatment, samples were washed in an ethanol
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