Imaging ellipsometry: quantitative analy
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Asinovski, L. ;Beaglehole, D. ;Clarkson, M. T.
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Article
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2008
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John Wiley and Sons
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English
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## Abstract Imaging ellipsometry (IE) combines spatial resolution of optical microscopy with thinβfilm measurement capabilities of ellipsometry. It has gained significant interest in recent years and is been used for a wide range of applications from biotechnology to semiconductor metrology. Tradit