Radiofrequency spark source mass spectrometric analysis of oxygen in undoped silicon crystals and of carbon in undoped and carbon doped gallium arsenide crystals

✍ Scribed by B. Wiedemann; K. Bethge; W. Schütze; U. Lambert; S. Pahlke; T. Reinhold; B. Weinert; T. Flade

• Book ID: 112291440
• Publisher: Springer
• Year: 1994
• Tongue: English
• Weight: 454 KB
• Volume: 350
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/bf00322489