Radio-frequency (RF) plasma etching of graphite with oxygen: a scanning tunnelling microscope study

✍ Scribed by Hong-Xing You; Norman M.D. Brown; Khalid F. Al-Assadi

• Book ID: 104199014
• Publisher: Elsevier Science
• Year: 1993
• Weight: 72 KB
• Volume: 284
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(93)90992-r