✦ LIBER ✦
Radio frequency glow discharge source with integrated voltage and current probes used for sputtering rate and emission yield measurements at insulating samples
✍ Scribed by L. Wilken; V. Hoffmann; K. Wetzig
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 624 KB
- Volume
- 383
- Category
- Article
- ISSN
- 1618-2650
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