✦ LIBER ✦
Radical-molecule and ion-molecule mechanisms in the polymerization of hydrocarbons and chlorosilanes in r.f. plasmas at low pressures (below 1.0 Torr)
✍ Scribed by R. Avni; U. Carmi; A. Inspektor; I. Rosenthal
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 646 KB
- Volume
- 118
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.