✦ LIBER ✦
Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
✍ Scribed by A. Niskanen; T. Hatanpää; K. Arstila; M. Leskelä; M. Ritala
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 361 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0948-1907
No coin nor oath required. For personal study only.