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Radiation measurements from an inverted relativistic magnetron

โœ Scribed by Close, R. A.; Palevsky, A.; Bekefi, G.

Book ID
120586648
Publisher
American Institute of Physics
Year
1983
Tongue
English
Weight
525 KB
Volume
54
Category
Article
ISSN
0021-8979

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An inverted cylindrical magnetron sputtering system operating at 6.5 kW, 85 sccm argon, and 0.27 Pa was used to produce a mid-frequency AC (40 kHz) Al-Ar plasma. Optical emission spectroscopy was used to monitor the plasma emission from 680 nm to 830 nm. Absolute calibration of the emission data was