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Radiation-Induced Defects in Silicon Due to Low-Energetic Ion-Assisted Deposition of Indium Tin Oxide

✍ Scribed by Zettler, J. Th. ;Bollmann, J. ;Heckner, K. H. ;Klose, H. A.


Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
472 KB
Volume
112
Category
Article
ISSN
0031-8965

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