✦ LIBER ✦
Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system
✍ Scribed by Gaines, David P. ;Spitzer, Ronnie C. ;Ceglio, Natale M. ;Krumrey, Michael ;Ulm, Gerhard
- Book ID
- 115343119
- Publisher
- The Optical Society
- Year
- 1993
- Tongue
- English
- Weight
- 1013 KB
- Volume
- 32
- Category
- Article
- ISSN
- 1559-128X
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