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Radiation Hardened by Design RF Circuits Implemented in 0.13 $\mu$m CMOS Technology

✍ Scribed by Chen, W.; Pouget, V.; Gentry, G. K.; Barnaby, H. J.; Vermeire, B.; Bakkaloglu, B.; Kiaei, S.; Holbert, K. E.; Fouillat, P.


Book ID
120050264
Publisher
IEEE
Year
2006
Tongue
English
Weight
626 KB
Volume
53
Category
Article
ISSN
0018-9499

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## Abstract A coplanar waveguide (CPW) was implemented in 0.13 ΞΌm CMOS technology and then postprocessed by CMOS compatible inductively‐coupled plasma etching, which removed the silicon underneath the coplanar strips. Transmission line parameters such as characteristic impedance Z~O~, attenuation c