Radiation enhanced diffusion of implanted platinum in silicon guided by helium co-implantation for arbitrary control of platinum profile

✍ Scribed by Pavel Hazdra; Jan Vobecký

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 244 KB
• Volume: 230
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.12.045