Thin films of YBazCuaO+x are deposited on MgO substrates via dc magnetron sputter technic. The thicknesses varry between 1Onm and 500nm. The films are patterned by dry etching method. Narrow stripes with widths down to 1 urn are obtained without serious degradation, e.g. Tc,ocf > 85K and Tc < 1.6K.
Radiation damages and flux pinning in YBa2Cu3O7 thin films
β Scribed by Y.J. Zhao; W.K. Chu; M.F. Davis; J.C. Wolfe; S.C. Deshmukh; D.J. Economou; Anne Mcguire
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 547 KB
- Volume
- 184
- Category
- Article
- ISSN
- 0921-4534
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