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Radiation-acoustic effect in polymers irradiated with high-current electron beams

✍ Scribed by G. I. Gering; N. A. Eliseev; V. V. Fedosov


Publisher
Springer US
Year
1992
Tongue
English
Weight
319 KB
Volume
27
Category
Article
ISSN
1573-8922

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Charging effect becomes a more serious issue when performing electron beam lithography using high beam current. Here we studied the charging effect using PMMA, PMGI and ZEP-520A resist to pattern 200 nm period hole array. It is found that charging effect can be reduced by simply re-arranging the exp